This paper proposes a novel 3-DOFs positioner system with large travel ranges is presented, which can be integrated with atomic force microscope (AFM) for precise positioning.

• 本论文研究之目的是设计并实现一新型、长行程、三自由度运动的奈米级定位平台，此平台能够整合并应用于原子力显微镜，来达成长行程与精密定位之需求。