Theoretical calculation results indicate that the natural frequency is proportional to the width of silicon beam, increased nonlinearly with the rake angle of oblique beam, and reduced nonlinearly with the length of silicon beam.

• 理论计算结果表明,V型电热硅微致动器固有频率是随硅梁宽度的增加而线性增大,随斜梁长度增加而非线性减小,随斜梁倾角增加而非线性增大。