Their microstructure was studied by Raman and SEM and the phenomena were analyzed by phonon confinement theory and the surface effects of nanocrystallites on Raman shift.

• 然后用快速光热退火炉(RTP)在600℃下对样品进行了7m in的退火处理,借助Ram an和SEM对退火前后硅薄膜微结构进行了研究,并用声子限域理论和纳晶表面效应对实验现象进行了分析。