The scheme can achieve 195V/pF sensitivity and IfF minimum detectable capacitance variance, which can satisfy the capacitive micromachined inertial sensors with ordinary precision.

• 采用一组标定电容作为传感器的模型进行了实验,实验电路灵敏度可以达到195V/pF,最小分辨率为1fF。 采用该方案能够满足对普通精度的电容式微机械惯性传感器信号的检测。