The glass-ceramic in Li2O-Al2O3-SiO2 system including Na2O with TiO2 and ZrO2 as nucleation agents, which was used to anodic bond in MEMS, was p roduced by the way of conventional melt quenching technology and two-step heat-t reatment.

• 采用传统的熔体冷却方法,研究以TiO2和ZrO2为成核剂,以含Na2O的Li2O-Al2O3-SiO2系统微晶玻璃为基础组成,通过二步法热处理制度制备出符合微电子机械系统静电键合要求的微晶玻璃材料。