The beam drift phenomenon in the focused ion beam(FIB) system made byourselves are briefly introduced and the factors causing the drift amd measures toreduce the drift are discussed.

• 简要介绍了自制的聚焦离子束（FIB）系统中束着靶点的飘移现象，分析引起飘移的原因及所采取降低飘移的措施。