A novel metal micro-parts fabrication technology was presented herein.The anode which also served as a mask was patterned by UV lithography,and used to confine the region of electrodeposition.

• 提出了屏蔽膜板随动式微细电铸技术,屏蔽阳极膜板随电沉积层的增加而微量移动,从而可以用厚度有限的屏蔽层制造出原理上高度不受限制的三维金属微结构。