This paper presents the design and performance of a novel uncooled infrared (IR) detector, which is micro-fabricated basing on standard silicon process. 介绍一种基于标准硅工艺、采用电容读出方式微悬臂梁非制冷红外探测器的设计、制作及性能测试。
A new type of uncooled infrared detector with polyimide thermal-isolation structure is presented. 摘要提出了一种基于聚酰亚胺绝热层的新型非制冷红外探测器结构。
The MEMS technology and its main characteristics are briefly described, and then its application in uncooled infrared detector is introduced in details. 本文简要介绍了MEMS技术的工艺及其主要特点，幷对MEMS技术在非制冷红外探测器研制方面的应用作了比较详细的阐述。
A new type of uncooled infrared detector with polyimide thermal-isolation structure is presented.The detector has the advantage of simpler process, lower cost and higher yield. 提出了一种基于聚酰亚胺绝热层的新型非制冷红外探测器结构.