With the rapid development of modern technology and MEMS technique, higher performance is required in the inductively-coupled plasma source (ICPS), so it becomes a focus and difficulty how to effectively design ICPS in ICP technology.

• 随着现代科技和MEMS工艺的发展，人们对电感耦合等离子体源的性能提出了更高的要求，所以如何有效地设计电感耦合等离子体源就成为电感耦合等离子体技术中的重点和难点。