With the Finite Element Method (FEM), the distortion of the elements will decrease theprecision, so Element Free Galerkin Method (EFGM) is used to solve this problem.

• 薄膜尺寸非常小；用有限元方法进行单元剖分时会产生严重的网格变形；降低计算精度；这里选用无单元 Galerkin 方法有效地解决了这一问题.