This thesis is divided into two parts.In the first part, we deposite the flake-like graphite with the mixture of methane, hydrogen and argon in the R.F. magnetron sputtering system.

• 中文摘要本论文共分成两部份，在第一个部分是在射频溅镀系统中通入甲烷、氢气和氩气的混合气体，成长出片状结构的石墨。