This thesis introduces microsphere lithography (MSL) and photoelectrochemical (PEC) etching, and describes how to fabricate sub-micro triangular rods by these methods.

• 本论文详细介绍了微米小球显影术及光致化学蚀法，并利用两者及湿式蚀刻于氮化镓上制作了次微米级的三角柱结构。