This paper presents a kind of single PZT actuator micro positioning work piece table, which uses flexure hinges as pre-load mechanism and a high-precis ion rolling guide support mechanism.

• 设计了一种利用弹性铰链作为预紧机构、高精度滚动导轨作为导向机构的单PZT驱动的微进给平台。利用有限元方法对微进给平台的结构和静、动态特性进行了研究。