These materials include AZ P4620,Shipley SPR220,AZ PLP100XT,JSR THB611P,and SU-8.Finally,equipment was developed to han-dle these materials,in the form of specialized coating equipment and contact?

• 这些材料包括AZP4620.；ShipleySPR220AIPLP100XT、JSRTHB611P和SU-8。 最终开发了处理这些材料的设备；制作了专用的涂胶设备和接触?