The work theory of 247C Four-channel Readout produced by MKS corporation is expounded in this paper,then the voltage-flow curve of the equipment is obtained through a experiment in typical work condition.

• 分析了MKS公司生产的气体流量控制系统247CFour-ChannelReadout的工作原理,并通过实验得出系统的工作曲线,并设计出该仪器与PC并口的接口电路。