The results showed that adding of TEOS to the film can improve the friction behavior, and the lowest friction coefficient and better hardness can be achieved by adding 20 wt% tetraethoxysilanes.

• 对膜体系改性后各种指标进行了分析。结果表明：摩擦学行为可以通过在涂层系统中添加不同含量的TEOS来影响，在含有20%25TEOS的膜中，有最小的摩擦系数和较好的抗压痕性。