The results showed that Si-B-N thin films involving obvious hexagonal borazon(h _ BN) and cubic borazon(c _ BN) crystalline phases could be obtained by applying a suitable negative bias voltage to the substrate of samples.

• 结果表明 ,通过给试样基体加一适当的直流负偏压 ,得到含有显著六方氮化硼 (h_BN)、立方氮化硼 (c_BN)结晶相的Si-B -N薄膜