The results show that image contrast and focal de pth can be obviously improved by pupil filtering.It is an effective technique t o improve the image quality of photolithographic system.

• 研究结果表明，光瞳滤波能大幅度提高投影光刻成像分辨力并增大焦深，是一种比较有效的提高光刻成像质量的技术。