The research introduced a domestic microwave plasma chemical vapordeposition (MPCVD) equipment with a quartz glass window and water-cooledstainless steel reaction chamber in 2450MHz/5 Kw.

• 本文详细介绍了自行研制的2450MHz／5KW带有石英玻璃窗、水冷却不锈钢腔体微波等离子体化学气相沉积(MPCVD)装置。