The platform is used to monitor the grinding strength in the course of polishing.It would be helpful to study the relation among abrasion mechanism, grinding strength and technology paramete...

• 该平台主要用于薄膜抛光过程中磨削力的实时监测,分析磨削力对抛光精度的影响,有助于研究抛光膜损伤机理与磨削力、工艺参数之间的关系。