The other motivation of this paper is to investigate the influence of the fabrication conditions on the EFE properties of the films in order to get the optimal deposition parameters.

• 本文以类金刚石膜的场发射应用为目的，研究了各种沉积条件对膜的场发射性能的影响，摸索出获得最佳发射时膜的沉积参数。