The microwave bulk acoustic delay lines with centre frequency of 8 GHz were fabricated using a multilayer structure consisting of alternative half wave thick layer of ZnO films with different electro mechanical coupling factors.

• 用具有不同机电耦合系数、厚度为半波长的交替排列多层氧化锌薄膜制成了中心频率为8GHz的声体波微波延迟线。