The major obstacle to develop MEMS and NEMS technique on quartz is the machining difficulty and the charging problem resulted from isolation in e-beam exposure process.

• 在石英材料上发展微奈米机电系统技术，最主要的瓶颈在于其加工困难度及非导电性在进行电子束微影时所产生之电荷累积效应。