The inorganic and organic pollutants in the photoresists containing wastewater after the treatment of the iron chipping micro electrolysis are analyzed by ICP-AES and GC-MS.

• 采用色谱-质谱联用分析仪和电感耦合等离子体发射光谱仪分析和鉴定了光致抗蚀剂废水中的污染物。