The effects of SPS and PMPS concentration on the etching velocity were analyzed,and the relations of H2SO4 and CuSO4 concentration with KMPS and SPS etching velocity were showed respectively.

• 分析了SPS浓度、KMPS浓度对蚀刻速率的影响,阐明了硫酸浓度、硫酸铜含量与KMPS、SPS蚀刻速率的各自关系。