The effect of high temperature in rapid thermal process (RTP) on the dissolution of oxygen precipitate generated by two-step (low-high) annealing is investigated.

• 摘要通过对已经过两步（低－高）退火的大直径直拉矽单晶片进行高温快速热处理，研究矽中氧沈淀被高温快速热处理消融的情况。