The convergent infrared optical monitor and controller were designed to monitor and control the film thickness in multilayer growth in fabricating immediate and far infrared band-pass filters.

• 摘要针对平行光红外光学系统存在光斑大、能量损失大等不足，设计了主要用于中远红外带通滤光片膜厚监控的会聚光红外光学系统及其光控系统。