The composition, conduction mechanisms, properties and fabrication techniques of ITO thin films have been reviewed, and the advantages of different preparation technologies and problems were also introduced.

• 摘要对玻璃表面ITO膜的组成、导电机制、性质和制备工艺进行描述，介绍各种制备工艺的优点及在今后的研究中要解决的问题。