The characteristics of good linearity, high resolution and high frequency were approved. The natural frequency reached 1.201 kHz using finite element analysis and the actual measurement result was 1 kHz.

• 研究表明；该驱动器具有线性良好、高分辨率、高频响等特点；由有限元分析得到的固有频率达到了1 201kHz；实际测量的固有频率为1kHz.