The a-D films have more than 85% sp3 bonding. Density of the films is more than 3 glcm3. Band gap of 2.4 eV is obtained. Hardness is about 30 60 GPa.

• 其SP~3键的含量超过 85%25，密度超过 3g/cm~3；禁带宽度达2.；4eV，显微硬度达30~60GPa，厚200nm的薄膜表面粗糙度小于1nm。