The Ta_2O-5/Ta samples as a referene material for depth profile have been investigated by PHI-590 scanning Auger microprobe. The Ta_2O_5 films of 500 (?)

• 利用俄歇电子谱仪对作为深度剖面分析定标用的Ta_2O_5/Ta标样在溅射过程中的行为进行了分析。