The Mach-Zehnder interferometer at 13.9 nm based on the multilayer beam splitters is used in 13.9 nm soft X-ray laser interference experiment,in which a clear interferogram of C_8H_8 laser-produced plasma is got.

• 使用多层膜分束镜构建了软X射线马赫贞德干涉仪；并应用于13.；9 nm软X射线激光干涉实验中；获得了清晰的含有C8H8等离子体电子密度信息的动态干涉条纹。