The LPF was accomplished with MEMS process, which is compatible with standard CMOS IC technology. Measurement results give - 3dB bandwidth of 2. 925GHz and midband insertion loss of 1. 2dB at 1GHz.

• 利用MEMS工艺实现的低通滤波器；其-3dB带宽和通带内插入损耗分别为2.；925GHz和1