The ISFETs of PECVD SiO2 as the sensing membrane and the REFETs with a sensing layer of sputtered Ta2O5 were fabricated to study the sensitivity and the drift characteristics.

• 本论文系利用电浆辅助化学气象沈积的二氧化矽当作离子感测电晶体的感测材料，以及利用溅镀的五氧化二钽当作参照电晶体的感测材料，来研究其感测度及飘移特性。