Super hard, thick DLC multilayer films has been investigated by filtered cathodic vicuum arc deposition, FCVA technology.
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采用过滤真空阴极直流弧源(FilteredCathodic Vicuum Arc Deposition;FCVA)方法沉积超硬(>6000HV)超厚(微米级)的DLC/DLC多层薄膜.
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