Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method.

• 利用电子回旋共振(ECR)微波等离子体辅助化学气相沉积技术、工作气氛为丙酮；在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜.