Sacrificial layer etching is one of the important technology in the surface manufacturing process of Micro-eletromechanical System (MEMS), It is highly affected to the MEMS device.

• 牺牲层腐蚀技术是微电子机械系统(MEMS)表面制造工艺技术之一,对MEMS器件的性能有着非常重要的影响。