SCD developed the first vacuum etching machine in china,with vacuum flood bar in the etching chamber;no pool effect;etching factor is up to 4.0.

• 简要说明：SCD开发了中国国内第一台真空蚀刻机，蚀刻室内加装真空水刀，从根本上解决了水池效应，蚀刻因子提高到4。0以上。