Micromachining of micro channels on planar glass and glassbonding are described.The effect of etching conditions on the etching speed and channel surface profiles is discussed.

• 研究了在平整的玻璃上制作微管道的方法和玻璃-玻璃键合技术：讨论了腐蚀条件对玻璃的腐蚀速率和微管道表面形貌的影响。