Micromachined gyroscope is a kind of typical micro-electro-mechanical system(MEMS) device, which consists of sensor, actuator, and control circuit, etc.

• 基于micro electro mechanicalsystem(MEMS)技术的微机械陀螺是集传感器、致动器、检测与控制等于一体的复杂多学科交叉系统 ,其整体特性是各个子系统综合作用的结果。