Keywords metrology;atomic force microscopy;nano-scale reference material;tip-induced anodization oxidation;mechanical modification;critical dimension;linearity;parallelism;
英
美
-
-
计量学;原子力显微镜;纳米样板;探针诱导阳极氧化;机械划刻;线宽;直线度;平行度;
以上内容独家创作,受著作权保护,侵权必究
海词词典,十七年品牌