It decomposed MEMS into some devices, then obtained the terminals and terminal parameters based on the device-behavior, at last got the relations between parameters using ANSYS.

• 这种建模技术将微电子机械系统分成比较简单的器件(子系统)，根据器件的行为特性得出器件的端点、端点变量，然后采用有限元软件ANSYS得出器件端点变量之间的关系。