In this paper,the reinforcement mechanism of laser for CVD and the choice of LCVD system are discussed.The applica-tion and future of LCVD in preparation of inorgathe thim films are introduced.

• 本文讨论了激光对化学气相反应的增强机制和激光CVD制备精细陶瓷薄膜系统的选择，介绍了激光CVD在无机物薄膜制备中的应用和前景。