In this paper different silicon-based materials of optical waveguide and its loss characteristics are introduced, with focus on silicon-based optic electronics integrated circuit (OEIC).

• 摘要以硅基光电集成回路为主线，综述了不同的硅基光波导材料的制备技术和硅基光波导的制作工艺及其对光传输损耗的影响。