GPM Loader feeds of cells from coin stack or cassette to system and un-loader reloads cells from conveyor to coin stack or cassette.

• 入料机/出料机：入料机从堆叠盒或卡式盒中取出晶片传送至制程机台；出料机从制程机台传输带取片放入堆叠盒或卡式盒.