For clipping issue in the FSG film integration, possible root rause had been analyzing.By improving the metal protection by liner layer, the problem had been diminished completely.

• 针对工艺集成过程中存在的FSG膜对金属的削蚀（Clipping)问题，分析其产生的可能原因，加强了liner层对金属的保护作用，完全避免了FSG膜对金属的削蚀问题；