Finally, with the emulating results under ANSYS, the locations of different piezoresisters were elementarily located.Chapter 3 presents the principle of the piezoresistance effect.

• 第三章首先介绍了压阻效应的基本原理，然后结合应力分析结果，分析了该探针的工作原理并对力敏电阻的分布位置进行了优化。