Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.

• 摘要采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。