FTIR,XRD and AFM are used to characterize the films.The refractive index and dielectric constant are measured by Ellipsometer and impedance analysis apparatus.

• 用红外光谱、小角XRD、原子力显微镜对样品进行了表征,并采用椭偏仪和阻抗分析仪测量薄膜的折射率和介电常数。