Electromagnetic planar micromotors were produced using AZ4903 with high depth-width ratios and thicknesses of the planar micromotor s stator windings.

• 为满足电磁型平面微电机对定子绕组线圈的高深宽比及厚度要求,提出一种利用AZ4903光刻胶制作电磁平面微电机定子绕组的方法。